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\citation{Mask_Aligner}
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\citation{florian_forster}
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\@writefile{lof}{\contentsline {figure}{\numberline {2.3}{\ignorespaces (\subref  {fig:mask_aligner_nomenclature_motors}) the nomenclature for the motors of Mask Aligner. (\subref  {fig:mask_aligner_nomenclature_components}) the components of the Mask Aligner \textbf  {A} carrying frame \textbf  {B} piezo stack, \textbf  {C} stoppers, \textbf  {D} sliding rail for x-movement, \textbf  {E} sample stage, \textbf  {F} sample \textbf  {G} sample holder, \textbf  {H} mask frame, \textbf  {I} mask stage, \textbf  {J} mask, \textbf  {K} mask shuttle, \textbf  {L} neodymium magnet, \textbf  {M} \ce {Al2O3} plate, \textbf  {N} \ce {CuBe} spring, \textbf  {O} piezo motor front plate, \textbf  {P} sapphire prism, \textbf  {Q} lower body. In \textcolor {tab_red}{red} the molecular beam path to the mask is displayed.}}{18}{figure.caption.18}\protected@file@percent }
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\citation{Beeker}
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