Transfer Into
Mask before sample
- Move the stage into the stoppers to prevent it from falling out and potentially being lost in the mask aligner chamber.
- Do not use excessive force, this process does not require much force.
- do not fully open the claw of the wobblestick after it sits well in the flag. If the mask becomes misaligned, you can carefully release a bit of pressure and move side to side. The same goes for the sample.
- Using the wobblestick, use the pin to stick into the flag of the mask holder.
- Now move the mask into the mask stage and carefully push it in until it sits firmly.
- Now move the sample from the garage into the spring sample holder, similar to the mask, the pin has to sit well in the flag. 3 capacitance signals should be measured. If less than 3 signals are measured, either insertion is not firm enough or the mask is damaged.
- If three signals are measured, insertion is complete and mask aligner can be used.
- Transfer in is now complete.
Tranfer out of
Sample before mask
- Move the stage into the stoppers to prevent it from falling out and potentially being lost in the mask aligner chamber.
- Do not use excessive force, this process does not require much force.
- do not fully open the claw of the wobblestick after it sits well in the flag. If the mask becomes misaligned, you can carefully release a bit of pressure and move side to side. The same goes for the sample.
- Using the wobblestick, use the pin to stick into the flag of the sample and carefully pull out the sample and put it in the garage. Due to the large height of the mask pins there has to be an empty space in the garage after each mask, aside from the lowest spot, where the mask can be inserted upside down.
- Using the wobblestick do the same for the mask.
- Transfer out is now complete.