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The capacitance relay is used to measure $C_i$ in order}{figure.caption.51}{}} \@setckpt{chap03}{ \setcounter{page}{43} \setcounter{equation}{1} @@ -101,7 +100,7 @@ \setcounter{subfigure}{0} \setcounter{subtable}{0} \setcounter{lstnumber}{1} -\setcounter{@todonotes@numberoftodonotes}{3} +\setcounter{@todonotes@numberoftodonotes}{2} \setcounter{float@type}{8} \setcounter{AM@survey}{0} \setcounter{thm}{0} diff --git a/chap03.tex b/chap03.tex index 116e1d9aa7843f78366ab7eabe6107227ff80ef3..1d45a9bd3064b97f1ba3a06e453081995738e1f5 100644 --- a/chap03.tex +++ b/chap03.tex @@ -88,7 +88,7 @@ Due to the aforementioned behaviors of the KIM001 device, the device was found t \section{Mask Aligner controller "Walker"} \subsection{Overview} -In order to find a suitable replacement for the RHK Piezo Motor controller, a new device to drive control pulses to the piezo stacks in the mask aligner was built. The \textbf{P}rinted \textbf{C}ircuit \textbf{B}oard (PCB) is based on the piezo Walker electronics designed to control the piezo Walker used for STM control.\todo{Check if erklärt} Due to this, the device is often referred to as the "Mask Aligner Walker", even though it is not a walker or stepper motor controller. Adaptations were made to adjust it to the desired slip-stick behavior needed for application in the mask aligner. The Controller takes a serial input command and then drives sinusoidal steps with a sharp fast flank at the center of the period. Controllable are the amplitude of the signal and the number of steps. A simplified overview of the entire signal generation process is shown in Appendix \ref{app:walker_diagram}. The following section will look at each part of the process in detail. +In order to find a suitable replacement for the RHK Piezo Motor controller, a new device to drive control pulses to the piezo stacks in the mask aligner was built. The \textbf{P}rinted \textbf{C}ircuit \textbf{B}oard (PCB) is based on the piezo Walker electronics designed to control the piezo Walker used for STM control. Due to this, the device is often referred to as the "Mask Aligner Walker", even though it is not a walker or stepper motor controller. Adaptations were made to adjust it to the desired slip-stick behavior needed for application in the mask aligner. The Controller takes a serial input command and then drives sinusoidal steps with a sharp fast flank at the center of the period. Controllable are the amplitude of the signal and the number of steps. A simplified overview of the entire signal generation process is shown in Appendix \ref{app:walker_diagram}. The following section will look at each part of the process in detail. \subsection{Signal generation} The core of the Mask aligner controller is an Arduino DUE~\cite{arduino_datasheet}. The \textbf{C}entral \textbf{P}rocessing \textbf{U}nit (CPU) of the Arduino DUE the "Atmel SAM3X8E ARM Cortex-M3 CPU" is a $32$-Bit ARM-Core microcontroller. Integrated into the CPU is a $12$-Bit \textbf{D}igital to \textbf{A}nalog \textbf{C}onverter (DAC)~\cite{arduino_cpu_datasheet}. The DAC comes with two output channels that can output simultaneously. The signal provided to the DAC is generated via software. 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The parameters of the ellipse are the same as in Figure \ref {fig:evaporation_simulation_first_compare}}{figure.caption.77}{}} \@writefile{toc}{\contentsline {subsection}{\numberline {5.5.3}Software improvements}{71}{subsection.5.5.3}\protected@file@percent } \@writefile{toc}{\contentsline {subsection}{\numberline {5.5.4}Final Remark}{72}{subsection.5.5.4}\protected@file@percent } \@setckpt{chap05}{ @@ -121,7 +121,7 @@ \setcounter{subfigure}{3} \setcounter{subtable}{0} \setcounter{lstnumber}{1} -\setcounter{@todonotes@numberoftodonotes}{3} +\setcounter{@todonotes@numberoftodonotes}{2} \setcounter{float@type}{8} \setcounter{AM@survey}{0} \setcounter{thm}{0} diff --git a/chap05.tex b/chap05.tex index b8da8df561ede9fdb82ee48f0f7142aa66a97847..4b7372545c9e333dd01a838114b48974b14d8560 100644 --- a/chap05.tex +++ b/chap05.tex @@ -251,7 +251,7 @@ The image of the mask (Figure \ref{fig:evaporation_SEM_mask}) shows no damage to \caption{} \label{fig:evaporation_SEM_analysis_clog_overlay} \end{subfigure} - \caption{(\subref{fig:evaporation_SEM_analysis_clog}) example of the clogging noticed on $4$ of the mask holes. \subref{fig:evaporation_SEM_analysis_clog_overlay} tilt direction from \ref{fig:evaporation_tilts} overlayed over the SEM image of the mask after it was rotated to match the fields.} + \caption{(\subref{fig:evaporation_SEM_analysis_clog}) example of the clogging noticed on $4$ of the mask holes. (\subref{fig:evaporation_SEM_analysis_clog_overlay}) tilt direction from \ref{fig:evaporation_tilts} overlayed over the SEM image of the mask after it was rotated to match the fields.} \label{fig:evaporation_SEM_analysis} \end{figure} diff --git a/conclusion.aux b/conclusion.aux index 4fb528cd9c87e9c704d5110c19c67bd3c5b17712..35cc92e0dced9b0ab9b0860e9784f8244044f776 100644 --- a/conclusion.aux +++ b/conclusion.aux @@ -1,7 +1,7 @@ \relax \providecommand\hyper@newdestlabel[2]{} \citation{self_epitaxy} -\@writefile{toc}{\contentsline {chapter}{Conclusions and Outlook}{73}{chapter*.79}\protected@file@percent } +\@writefile{toc}{\contentsline {chapter}{Conclusions and Outlook}{73}{chapter*.78}\protected@file@percent } \@setckpt{conclusion}{ \setcounter{page}{74} \setcounter{equation}{1} @@ -32,7 +32,7 @@ \setcounter{subfigure}{3} \setcounter{subtable}{0} \setcounter{lstnumber}{1} -\setcounter{@todonotes@numberoftodonotes}{3} +\setcounter{@todonotes@numberoftodonotes}{2} \setcounter{float@type}{8} \setcounter{AM@survey}{0} \setcounter{thm}{0} diff --git a/pdfa.xmpi b/pdfa.xmpi index b7b7fcffb7ef4b3e67e05bb0a6daa268f972d692..6e09b8423f7855dbf6eb486a5420dc44e40dc6ae 100644 --- a/pdfa.xmpi +++ b/pdfa.xmpi @@ -73,15 +73,15 @@ </rdf:Description> <rdf:Description rdf:about="" xmlns:xmp="http://ns.adobe.com/xap/1.0/"> <xmp:CreatorTool>LaTeX with hyperref</xmp:CreatorTool> - <xmp:ModifyDate>2024-10-02T19:52:12+02:00</xmp:ModifyDate> - <xmp:CreateDate>2024-10-02T19:52:12+02:00</xmp:CreateDate> - <xmp:MetadataDate>2024-10-02T19:52:12+02:00</xmp:MetadataDate> + <xmp:ModifyDate>2024-10-03T01:00:02+02:00</xmp:ModifyDate> + <xmp:CreateDate>2024-10-03T01:00:02+02:00</xmp:CreateDate> + <xmp:MetadataDate>2024-10-03T01:00:02+02:00</xmp:MetadataDate> </rdf:Description> <rdf:Description rdf:about="" xmlns:xmpRights = "http://ns.adobe.com/xap/1.0/rights/"> </rdf:Description> <rdf:Description rdf:about="" xmlns:xmpMM="http://ns.adobe.com/xap/1.0/mm/"> <xmpMM:DocumentID>uuid:C8CFC28F-88E1-7995-E9AD-F6D12EAD346B</xmpMM:DocumentID> - <xmpMM:InstanceID>uuid:97438A4A-2AC4-AE09-314C-897EDFB3EFBC</xmpMM:InstanceID> + <xmpMM:InstanceID>uuid:96D507C5-D4CF-027E-6900-18B3564C2203</xmpMM:InstanceID> </rdf:Description> </rdf:RDF> </x:xmpmeta> diff --git a/thesis.aux b/thesis.aux index 41a9eac9ee68edcd2fa00e2a994ff902bab416d2..ee952b0f772fb31f59308d48f4cce1a8bb3e6b58 100644 --- a/thesis.aux +++ b/thesis.aux @@ -8,20 +8,17 @@ \@input{chap01.aux} \@input{chap02.aux} \@input{chap03.aux} -\pgfsyspdfmark {pgfid1}{12300331}{22092655} -\pgfsyspdfmark {pgfid4}{37433768}{22113429} -\pgfsyspdfmark {pgfid5}{39282063}{21838703} -\pgfsyspdfmark {pgfid6}{4736286}{14857764} -\pgfsyspdfmark {pgfid9}{37433768}{14878538} -\pgfsyspdfmark {pgfid10}{39282063}{14603812} -\pgfsyspdfmark {pgfid11}{19294448}{46753504} -\pgfsyspdfmark {pgfid14}{37433768}{46774278} -\pgfsyspdfmark {pgfid15}{39282063}{46499552} +\pgfsyspdfmark {pgfid1}{4736286}{14857764} +\pgfsyspdfmark {pgfid4}{37433768}{14878538} +\pgfsyspdfmark {pgfid5}{39282063}{14603812} +\pgfsyspdfmark {pgfid6}{19294448}{46753504} +\pgfsyspdfmark {pgfid9}{37433768}{46774278} +\pgfsyspdfmark {pgfid10}{39282063}{46499552} \@input{chap04.aux} \@input{chap05.aux} \@input{conclusion.aux} \@input{bibliography.aux} -\@writefile{toc}{\contentsline {chapter}{List of Abbreviations}{77}{chapter*.81}\protected@file@percent } +\@writefile{toc}{\contentsline {chapter}{List of Abbreviations}{77}{chapter*.80}\protected@file@percent } \@input{appendix.aux} \@input{acknowledgments.aux} \providecommand\NAT@force@numbers{}\NAT@force@numbers diff --git a/thesis.log b/thesis.log index e0ce0300e2a70e05719fc4416d80614a6dc96781..fe6f4d922cee5f78ca2c22086952e5dae44b8793 100644 --- a/thesis.log +++ b/thesis.log @@ -1,4 +1,4 @@ -This is pdfTeX, Version 3.141592653-2.6-1.40.25 (MiKTeX 24.1) (preloaded format=pdflatex 2024.9.29) 2 OCT 2024 19:52 +This is pdfTeX, Version 3.141592653-2.6-1.40.25 (MiKTeX 24.1) (preloaded format=pdflatex 2024.9.29) 3 OCT 2024 01:00 entering extended mode restricted \write18 enabled. %&-line parsing enabled. @@ -2137,27 +2137,27 @@ File: img/Plots/KIM001/voltage_behavior.pdf Graphic file (type pdf) Package pdftex.def Info: img/Plots/KIM001/voltage_behavior.pdf used on input l ine 82. 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