diff --git a/chap02.aux b/chap02.aux
index 20415045f1d3663d4b8b90c31547ae1576f90fb1..70fa20b50988381ce6fcd4aa9660e1304a328ab4 100644
--- a/chap02.aux
+++ b/chap02.aux
@@ -15,8 +15,8 @@
\newlabel{sub@fig:mask_aligner_nomenclature_motors}{{a}{18}{\relax }{figure.caption.18}{}}
\newlabel{fig:mask_aligner_nomenclature_components}{{2.3b}{18}{\relax }{figure.caption.18}{}}
\newlabel{sub@fig:mask_aligner_nomenclature_components}{{b}{18}{\relax }{figure.caption.18}{}}
-\@writefile{lof}{\contentsline {figure}{\numberline {2.3}{\ignorespaces (\subref {fig:mask_aligner_nomenclature_motors}) shows the nomenclature for the motors of Mask Aligner. (\subref {fig:mask_aligner_nomenclature_components}) shows the components of the Mask Aligner \textbf {A} carrying frame \textbf {B} piezo stack, \textbf {C} stoppers, \textbf {D} sliding rail for x-movement, \textbf {E} sample stage, \textbf {F} sample \textbf {G} sample holder, \textbf {H} mask frame, \textbf {I} mask stage, \textbf {J} mask, \textbf {K} mask shuttle, \textbf {L} neodymium magnet, \textbf {M} \ce {Al2O3} plate, \textbf {N} \ce {CuBe} spring, \textbf {O} piezo motor front plate, \textbf {P} sapphire prism, \textbf {Q} lower body. In \textcolor {tab_red}{red} the molecular beam path to the mask is displayed.}}{18}{figure.caption.18}\protected@file@percent }
-\newlabel{fig:mask_aligner_nomenclature}{{2.3}{18}{(\subref {fig:mask_aligner_nomenclature_motors}) shows the nomenclature for the motors of Mask Aligner. (\subref {fig:mask_aligner_nomenclature_components}) shows the components of the Mask Aligner \textbf {A} carrying frame \textbf {B} piezo stack, \textbf {C} stoppers, \textbf {D} sliding rail for x-movement, \textbf {E} sample stage, \textbf {F} sample \textbf {G} sample holder, \textbf {H} mask frame, \textbf {I} mask stage, \textbf {J} mask, \textbf {K} mask shuttle, \textbf {L} neodymium magnet, \textbf {M} \ce {Al2O3} plate, \textbf {N} \ce {CuBe} spring, \textbf {O} piezo motor front plate, \textbf {P} sapphire prism, \textbf {Q} lower body. In \textcolor {tab_red}{red} the molecular beam path to the mask is displayed}{figure.caption.18}{}}
+\@writefile{lof}{\contentsline {figure}{\numberline {2.3}{\ignorespaces (\subref {fig:mask_aligner_nomenclature_motors}) the nomenclature for the motors of Mask Aligner. (\subref {fig:mask_aligner_nomenclature_components}) the components of the Mask Aligner \textbf {A} carrying frame \textbf {B} piezo stack, \textbf {C} stoppers, \textbf {D} sliding rail for x-movement, \textbf {E} sample stage, \textbf {F} sample \textbf {G} sample holder, \textbf {H} mask frame, \textbf {I} mask stage, \textbf {J} mask, \textbf {K} mask shuttle, \textbf {L} neodymium magnet, \textbf {M} \ce {Al2O3} plate, \textbf {N} \ce {CuBe} spring, \textbf {O} piezo motor front plate, \textbf {P} sapphire prism, \textbf {Q} lower body. In \textcolor {tab_red}{red} the molecular beam path to the mask is displayed.}}{18}{figure.caption.18}\protected@file@percent }
+\newlabel{fig:mask_aligner_nomenclature}{{2.3}{18}{(\subref {fig:mask_aligner_nomenclature_motors}) the nomenclature for the motors of Mask Aligner. (\subref {fig:mask_aligner_nomenclature_components}) the components of the Mask Aligner \textbf {A} carrying frame \textbf {B} piezo stack, \textbf {C} stoppers, \textbf {D} sliding rail for x-movement, \textbf {E} sample stage, \textbf {F} sample \textbf {G} sample holder, \textbf {H} mask frame, \textbf {I} mask stage, \textbf {J} mask, \textbf {K} mask shuttle, \textbf {L} neodymium magnet, \textbf {M} \ce {Al2O3} plate, \textbf {N} \ce {CuBe} spring, \textbf {O} piezo motor front plate, \textbf {P} sapphire prism, \textbf {Q} lower body. In \textcolor {tab_red}{red} the molecular beam path to the mask is displayed}{figure.caption.18}{}}
\@writefile{toc}{\contentsline {section}{\numberline {2.2}Slip stick principle}{19}{section.2.2}\protected@file@percent }
\@writefile{lof}{\contentsline {figure}{\numberline {2.4}{\ignorespaces Image showing the slip-stick principle. On the right an example signal is shown.}}{20}{figure.caption.19}\protected@file@percent }
\newlabel{fig:slip_stick_diagram}{{2.4}{20}{Image showing the slip-stick principle. On the right an example signal is shown}{figure.caption.19}{}}
@@ -26,8 +26,8 @@
\newlabel{sub@fig:screw_firmness_screw_image}{{a}{21}{\relax }{figure.caption.20}{}}
\newlabel{fig:screw_firmness_plot}{{2.5b}{21}{\relax }{figure.caption.20}{}}
\newlabel{sub@fig:screw_firmness_plot}{{b}{21}{\relax }{figure.caption.20}{}}
-\@writefile{lof}{\contentsline {figure}{\numberline {2.5}{\ignorespaces (\subref {fig:screw_firmness_screw_image}) shows a frontal view of the motor Z2 marked in red is the screw used for calibration of the motors on the Mask Aligner. (\subref {fig:screw_firmness_plot}) shows example curves of how the screws of Z2 and Z3 affect the given motor's step size. The $0.0$ screw rotation is arbitrary. $+$ means retraction and $-$ means approach (Fig. \ref {fig:mask_aligner_nomenclature_motors}). The jumps in signal result from the \ce {CuBe} plate slipping across the winding of the screw. }}{21}{figure.caption.20}\protected@file@percent }
-\newlabel{fig:screw_firmness}{{2.5}{21}{(\subref {fig:screw_firmness_screw_image}) shows a frontal view of the motor Z2 marked in red is the screw used for calibration of the motors on the Mask Aligner. (\subref {fig:screw_firmness_plot}) shows example curves of how the screws of Z2 and Z3 affect the given motor's step size. The $0.0$ screw rotation is arbitrary. $+$ means retraction and $-$ means approach (Fig. \ref {fig:mask_aligner_nomenclature_motors}). The jumps in signal result from the \ce {CuBe} plate slipping across the winding of the screw}{figure.caption.20}{}}
+\@writefile{lof}{\contentsline {figure}{\numberline {2.5}{\ignorespaces (\subref {fig:screw_firmness_screw_image}) frontal view of the motor Z2 marked in red is the screw used for calibration of the motors on the Mask Aligner. (\subref {fig:screw_firmness_plot}) example curves of how the screws of Z2 and Z3 affect the given motor's step size. The $0.0$ screw rotation is arbitrary. $+$ means retraction and $-$ means approach (Fig. \ref {fig:mask_aligner_nomenclature_motors}). The jumps in signal result from the \ce {CuBe} plate slipping across the winding of the screw. }}{21}{figure.caption.20}\protected@file@percent }
+\newlabel{fig:screw_firmness}{{2.5}{21}{(\subref {fig:screw_firmness_screw_image}) frontal view of the motor Z2 marked in red is the screw used for calibration of the motors on the Mask Aligner. (\subref {fig:screw_firmness_plot}) example curves of how the screws of Z2 and Z3 affect the given motor's step size. The $0.0$ screw rotation is arbitrary. $+$ means retraction and $-$ means approach (Fig. \ref {fig:mask_aligner_nomenclature_motors}). The jumps in signal result from the \ce {CuBe} plate slipping across the winding of the screw}{figure.caption.20}{}}
\@writefile{toc}{\contentsline {subsection}{\numberline {2.3.2}Motor calibration}{21}{subsection.2.3.2}\protected@file@percent }
\newlabel{fig:calibration_uhv_points_of_interest_z1}{{2.6a}{22}{\relax }{figure.caption.21}{}}
\newlabel{sub@fig:calibration_uhv_points_of_interest_z1}{{a}{22}{\relax }{figure.caption.21}{}}
@@ -39,8 +39,8 @@
\newlabel{sub@fig:calibration_uhv_example_driving_z1}{{a}{23}{\relax }{figure.caption.22}{}}
\newlabel{fig:calibration_uhv_example_driving_z2}{{2.7b}{23}{\relax }{figure.caption.22}{}}
\newlabel{sub@fig:calibration_uhv_example_driving_z2}{{b}{23}{\relax }{figure.caption.22}{}}
-\@writefile{lof}{\contentsline {figure}{\numberline {2.7}{\ignorespaces Comparison of photographs recorded prior and after $1000$ steps were driven. (\subref {fig:calibration_uhv_example_driving_z1}) top of motor Z1, inset shows a zoom in of the top plate. The image after driving $1000$ approach steps superimposed. \textcolor {tab_red}{Red} lines show the top edge difference and resulting travel length. (\subref {fig:calibration_uhv_example_driving_z2}) shows the same as (\subref {fig:calibration_uhv_example_driving_z1}) for the screw used to determine step size for motor Z2. Inset shows both approach and retract for $1000$ steps.}}{23}{figure.caption.22}\protected@file@percent }
-\newlabel{fig:calibration_uhv_example_driving}{{2.7}{23}{Comparison of photographs recorded prior and after $1000$ steps were driven. (\subref {fig:calibration_uhv_example_driving_z1}) top of motor Z1, inset shows a zoom in of the top plate. The image after driving $1000$ approach steps superimposed. \textcolor {tab_red}{Red} lines show the top edge difference and resulting travel length. (\subref {fig:calibration_uhv_example_driving_z2}) shows the same as (\subref {fig:calibration_uhv_example_driving_z1}) for the screw used to determine step size for motor Z2. Inset shows both approach and retract for $1000$ steps}{figure.caption.22}{}}
+\@writefile{lof}{\contentsline {figure}{\numberline {2.7}{\ignorespaces Comparison of photographs recorded prior and after $1000$ steps were driven. (\subref {fig:calibration_uhv_example_driving_z1}) top of motor Z1, inset shows a zoom in of the top plate. The image after driving $1000$ approach steps superimposed. \textcolor {tab_red}{Red} lines show the top edge difference and resulting travel length. (\subref {fig:calibration_uhv_example_driving_z2}) same as (\subref {fig:calibration_uhv_example_driving_z1}) for the screw used to determine step size for motor Z2. Inset shows both approach and retract for $1000$ steps.}}{23}{figure.caption.22}\protected@file@percent }
+\newlabel{fig:calibration_uhv_example_driving}{{2.7}{23}{Comparison of photographs recorded prior and after $1000$ steps were driven. (\subref {fig:calibration_uhv_example_driving_z1}) top of motor Z1, inset shows a zoom in of the top plate. The image after driving $1000$ approach steps superimposed. \textcolor {tab_red}{Red} lines show the top edge difference and resulting travel length. (\subref {fig:calibration_uhv_example_driving_z2}) same as (\subref {fig:calibration_uhv_example_driving_z1}) for the screw used to determine step size for motor Z2. Inset shows both approach and retract for $1000$ steps}{figure.caption.22}{}}
\@writefile{lof}{\contentsline {figure}{\numberline {2.8}{\ignorespaces Top view of the Mask Aligner with the motors Z1-Z3 and the screws on the mask frame displayed. The triangle and line construction shows the derivation for the motor movement from screw movement.}}{24}{figure.caption.23}\protected@file@percent }
\newlabel{fig:calibration_screw_diff_explain}{{2.8}{24}{Top view of the Mask Aligner with the motors Z1-Z3 and the screws on the mask frame displayed. The triangle and line construction shows the derivation for the motor movement from screw movement}{figure.caption.23}{}}
\@writefile{lof}{\contentsline {figure}{\numberline {2.9}{\ignorespaces Upper curves: Measured distance of motors traveled as a function of steps driven with linear fit and marked results step size. $+$ is retract $-$ is approach (see Fig. \ref {fig:mask_aligner_nomenclature_motors}). Lower curves: deviation of the data points from fit.}}{24}{figure.caption.24}\protected@file@percent }
@@ -72,7 +72,7 @@
\newlabel{fig:mask_aligner_nomenclature_capacitances_mask}{{2.13b}{27}{\relax }{figure.caption.30}{}}
\newlabel{sub@fig:mask_aligner_nomenclature_capacitances_mask}{{b}{27}{\relax }{figure.caption.30}{}}
\newlabel{fig:mask_aligner_nomenclature_capacitances}{{\caption@xref {fig:mask_aligner_nomenclature_capacitances}{ on input line 282}}{27}{Capacitive distance measurements}{figure.caption.30}{}}
-\@writefile{lof}{\contentsline {figure}{\numberline {2.13}{\ignorespaces (\subref {fig:mask_aligner_nomenclature_capacitances_motors}) shows a cross-section of the Mask Aligner showing the labeling and rough positioning of the capacitance sensors on the mask (inner \textcolor {tab_red}{red} triangle) in relation to the $3$ piezo motor stacks. (\subref {fig:mask_aligner_nomenclature_capacitances_mask}) shows a diagram of the mask's dimensions as well as labeling of the mask's sensors. The inset shows the dimensions of the holey part of the mask, which is used to create patterns. Below is a cross section of the materials used.}}{27}{figure.caption.30}\protected@file@percent }
+\@writefile{lof}{\contentsline {figure}{\numberline {2.13}{\ignorespaces (\subref {fig:mask_aligner_nomenclature_capacitances_motors}) cross-section of the Mask Aligner showing the labeling and rough positioning of the capacitance sensors on the mask (inner \textcolor {tab_red}{red} triangle) in relation to the $3$ piezo motor stacks. (\subref {fig:mask_aligner_nomenclature_capacitances_mask}) diagram of the mask's dimensions as well as labeling of the mask's sensors. The inset shows the dimensions of the holey part of the mask, which is used to create patterns. Below is a cross section of the materials used.}}{27}{figure.caption.30}\protected@file@percent }
\@writefile{lof}{\contentsline {figure}{\numberline {2.14}{\ignorespaces Diagram showing how communication with the RHK and the Lock-in amplifier is done and how they interact with elements in vacuum. Red lines are input, black lines are output lines. The capacitance relay is used to measure $C_i$ one after another. The RHK relay controls, which motor is currently driven.}}{28}{figure.caption.31}\protected@file@percent }
\newlabel{fig:diagram_MA_circ}{{2.14}{28}{Diagram showing how communication with the RHK and the Lock-in amplifier is done and how they interact with elements in vacuum. Red lines are input, black lines are output lines. The capacitance relay is used to measure $C_i$ one after another. The RHK relay controls, which motor is currently driven}{figure.caption.31}{}}
\newlabel{eq:plate_capacitor}{{2.1}{28}{Capacitive distance measurements}{equation.2.3.1}{}}
diff --git a/chap02.tex b/chap02.tex
index 44155d03fc2082aaefa02cff151350145434adad..11fc2b5b42cfec9470d7b59b73f2a4ec4fd58016 100644
--- a/chap02.tex
+++ b/chap02.tex
@@ -45,7 +45,7 @@ In order to control the molecular flux, one can change the current applied to th
\caption{}
\label{fig:mask_aligner_nomenclature_components}
\end{subfigure}
- \caption{(\subref{fig:mask_aligner_nomenclature_motors}) shows the nomenclature for the motors of Mask Aligner. (\subref{fig:mask_aligner_nomenclature_components}) shows the components of the Mask Aligner \textbf{A} carrying frame \textbf{B} piezo stack, \textbf{C} stoppers, \textbf{D} sliding rail for x-movement, \textbf{E} sample stage, \textbf{F} sample \textbf{G}
+ \caption{(\subref{fig:mask_aligner_nomenclature_motors}) the nomenclature for the motors of Mask Aligner. (\subref{fig:mask_aligner_nomenclature_components}) the components of the Mask Aligner \textbf{A} carrying frame \textbf{B} piezo stack, \textbf{C} stoppers, \textbf{D} sliding rail for x-movement, \textbf{E} sample stage, \textbf{F} sample \textbf{G}
sample holder, \textbf{H} mask frame, \textbf{I} mask stage, \textbf{J} mask, \textbf{K} mask shuttle,
\textbf{L} neodymium magnet, \textbf{M} \ce{Al2O3} plate, \textbf{N} \ce{CuBe}
spring, \textbf{O} piezo motor front plate, \textbf{P} sapphire prism,
@@ -97,7 +97,7 @@ An example for how the screw firmness affects the step size can be seen in Figur
\caption{}
\label{fig:screw_firmness_plot}
\end{subfigure}
- \caption{(\subref{fig:screw_firmness_screw_image}) shows a frontal view of the motor Z2 marked in red is the screw used for calibration of the motors on the Mask Aligner. (\subref{fig:screw_firmness_plot}) shows example curves of how the screws of Z2 and Z3 affect the given motor's step size. The $0.0$ screw rotation is arbitrary. $+$ means retraction and $-$ means approach (Fig. \ref{fig:mask_aligner_nomenclature_motors}). The jumps in signal result from the \ce{CuBe} plate slipping across the winding of the screw. }
+ \caption{(\subref{fig:screw_firmness_screw_image}) frontal view of the motor Z2 marked in red is the screw used for calibration of the motors on the Mask Aligner. (\subref{fig:screw_firmness_plot}) example curves of how the screws of Z2 and Z3 affect the given motor's step size. The $0.0$ screw rotation is arbitrary. $+$ means retraction and $-$ means approach (Fig. \ref{fig:mask_aligner_nomenclature_motors}). The jumps in signal result from the \ce{CuBe} plate slipping across the winding of the screw. }
\label{fig:screw_firmness}
\end{figure}
@@ -146,7 +146,7 @@ the prism has traveled in the image of the camera is measured. This is done with
\caption{}
\label{fig:calibration_uhv_example_driving_z2}
\end{subfigure}
- \caption{Comparison of photographs recorded prior and after $1000$ steps were driven. (\subref{fig:calibration_uhv_example_driving_z1}) top of motor Z1, inset shows a zoom in of the top plate. The image after driving $1000$ approach steps superimposed. \textcolor{tab_red}{Red} lines show the top edge difference and resulting travel length. (\subref{fig:calibration_uhv_example_driving_z2}) shows the same as (\subref{fig:calibration_uhv_example_driving_z1}) for the screw used to determine step size for motor Z2. Inset shows both approach and retract for $1000$ steps.}
+ \caption{Comparison of photographs recorded prior and after $1000$ steps were driven. (\subref{fig:calibration_uhv_example_driving_z1}) top of motor Z1, inset shows a zoom in of the top plate. The image after driving $1000$ approach steps superimposed. \textcolor{tab_red}{Red} lines show the top edge difference and resulting travel length. (\subref{fig:calibration_uhv_example_driving_z2}) same as (\subref{fig:calibration_uhv_example_driving_z1}) for the screw used to determine step size for motor Z2. Inset shows both approach and retract for $1000$ steps.}
\label{fig:calibration_uhv_example_driving}
\end{figure}
@@ -280,7 +280,7 @@ Each mask consist of a $200$ $\mu$m thick \ce{Si} body. A $100\times100$ $\mu$m
\label{fig:mask_aligner_nomenclature_capacitances_mask}
\end{subfigure}
\label{fig:mask_aligner_nomenclature_capacitances}
- \caption{(\subref{fig:mask_aligner_nomenclature_capacitances_motors}) shows a cross-section of the Mask Aligner showing the labeling and rough positioning of the capacitance sensors on the mask (inner \textcolor{tab_red}{red} triangle) in relation to the $3$ piezo motor stacks. (\subref{fig:mask_aligner_nomenclature_capacitances_mask}) shows a diagram of the mask's dimensions as well as labeling of the mask's sensors. The inset shows the dimensions of the holey part of the mask, which is used to create patterns. Below is a cross section of the materials used.}
+ \caption{(\subref{fig:mask_aligner_nomenclature_capacitances_motors}) cross-section of the Mask Aligner showing the labeling and rough positioning of the capacitance sensors on the mask (inner \textcolor{tab_red}{red} triangle) in relation to the $3$ piezo motor stacks. (\subref{fig:mask_aligner_nomenclature_capacitances_mask}) diagram of the mask's dimensions as well as labeling of the mask's sensors. The inset shows the dimensions of the holey part of the mask, which is used to create patterns. Below is a cross section of the materials used.}
\end{figure}
The readout of the capacitance sensors is carried out with a Lock-in amplifier. The piezo motors are controlled with pulses from the RHK piezo motor controller. Communication with both the RHK and the Lock-in amplifier is done with a Matlab script. Figure \ref{fig:diagram_MA_circ} shows a diagram of the communication circuit. Settings of the Lock-in amplifier are available in Appendix \ref{app:lock_in}.
diff --git a/chap03.aux b/chap03.aux
index 4e3041d87b5e6a11751f16e2861eb2187d96c53c..72a115cba7e7e2171e88d54b4b7815e1012aa24f 100644
--- a/chap03.aux
+++ b/chap03.aux
@@ -19,8 +19,8 @@
\newlabel{sub@fig:RHK_pulse_shape_fast_flank_z1}{{a}{34}{\relax }{figure.caption.39}{}}
\newlabel{fig:RHK_pulse_shape_fast_flank_z2}{{3.2b}{34}{\relax }{figure.caption.39}{}}
\newlabel{sub@fig:RHK_pulse_shape_fast_flank_z2}{{b}{34}{\relax }{figure.caption.39}{}}
-\@writefile{lof}{\contentsline {figure}{\numberline {3.2}{\ignorespaces Plots showing the fast flank of the RHK signal, set to 80 V. (\subref {fig:RHK_pulse_shape_fast_flank_z1}) shows larger timescale of the same signal than (\subref {fig:RHK_pulse_shape_fast_flank_z2}).}}{34}{figure.caption.39}\protected@file@percent }
-\newlabel{fig:RHK_pulse_shape_fast_flank}{{3.2}{34}{Plots showing the fast flank of the RHK signal, set to 80 V. (\subref {fig:RHK_pulse_shape_fast_flank_z1}) shows larger timescale of the same signal than (\subref {fig:RHK_pulse_shape_fast_flank_z2})}{figure.caption.39}{}}
+\@writefile{lof}{\contentsline {figure}{\numberline {3.2}{\ignorespaces Plots showing the fast flank of the RHK signal, set to 80 V. (\subref {fig:RHK_pulse_shape_fast_flank_z1}) larger timescale of (\subref {fig:RHK_pulse_shape_fast_flank_z2}).}}{34}{figure.caption.39}\protected@file@percent }
+\newlabel{fig:RHK_pulse_shape_fast_flank}{{3.2}{34}{Plots showing the fast flank of the RHK signal, set to 80 V. (\subref {fig:RHK_pulse_shape_fast_flank_z1}) larger timescale of (\subref {fig:RHK_pulse_shape_fast_flank_z2})}{figure.caption.39}{}}
\@writefile{toc}{\contentsline {section}{\numberline {3.2}KIM001}{34}{section.3.2}\protected@file@percent }
\@writefile{toc}{\contentsline {subsection}{\numberline {3.2.1}Overview}{34}{subsection.3.2.1}\protected@file@percent }
\@writefile{toc}{\contentsline {subsection}{\numberline {3.2.2}Pulse shape}{34}{subsection.3.2.2}\protected@file@percent }
diff --git a/chap03.tex b/chap03.tex
index d3b00118addfc50757eb51429c808a4e4933294a..c4b7f8b66cae364813944357081cfc6e8f815d0a 100644
--- a/chap03.tex
+++ b/chap03.tex
@@ -43,7 +43,7 @@ It is noticeable that the pulse shapes for approach and retract are similar, but
\caption{}
\label{fig:RHK_pulse_shape_fast_flank_z2}
\end{subfigure}
- \caption{Plots showing the fast flank of the RHK signal, set to 80 V. (\subref{fig:RHK_pulse_shape_fast_flank_z1}) shows larger timescale of the same signal than (\subref{fig:RHK_pulse_shape_fast_flank_z2}).}
+ \caption{Plots showing the fast flank of the RHK signal, set to 80 V. (\subref{fig:RHK_pulse_shape_fast_flank_z1}) larger timescale of (\subref{fig:RHK_pulse_shape_fast_flank_z2}).}
\label{fig:RHK_pulse_shape_fast_flank}
\end{figure}
diff --git a/chap04.aux b/chap04.aux
index bfbd6eee04bf73e9da2903228b5008b91b188a44..0a90286c52d846f139de8d75441a349e1753c3b4 100644
--- a/chap04.aux
+++ b/chap04.aux
@@ -9,8 +9,8 @@
\newlabel{sub@fig:Repair_Diagram_diagram}{{a}{43}{\relax }{figure.caption.55}{}}
\newlabel{fig:Repair_Diagram_image}{{4.1b}{43}{\relax }{figure.caption.55}{}}
\newlabel{sub@fig:Repair_Diagram_image}{{b}{43}{\relax }{figure.caption.55}{}}
-\@writefile{lof}{\contentsline {figure}{\numberline {4.1}{\ignorespaces (\subref {fig:Repair_Diagram_diagram}) diagram of front view of a single piezo motor with associated nomenclature. Front plate is turned around and moved to the side. (\subref {fig:Repair_Diagram_image}) shows a roughly corresponding image as a photo of the Mask Aligner. The lower right solder anchor is detached in the image and the lower left solder anchor is bridged with a technique discussed in Section \ref {ch:solder_anchors}}}{43}{figure.caption.55}\protected@file@percent }
-\newlabel{fig:Repair_Diagram}{{4.1}{43}{(\subref {fig:Repair_Diagram_diagram}) diagram of front view of a single piezo motor with associated nomenclature. Front plate is turned around and moved to the side. (\subref {fig:Repair_Diagram_image}) shows a roughly corresponding image as a photo of the Mask Aligner. The lower right solder anchor is detached in the image and the lower left solder anchor is bridged with a technique discussed in Section \ref {ch:solder_anchors}}{figure.caption.55}{}}
+\@writefile{lof}{\contentsline {figure}{\numberline {4.1}{\ignorespaces (\subref {fig:Repair_Diagram_diagram}) diagram of front view of a single piezo motor with associated nomenclature. Front plate is turned around and moved to the side. (\subref {fig:Repair_Diagram_image}) a roughly corresponding image as a photo of the Mask Aligner. The lower right solder anchor is detached in the image and the lower left solder anchor is bridged with a technique discussed in Section \ref {ch:solder_anchors}}}{43}{figure.caption.55}\protected@file@percent }
+\newlabel{fig:Repair_Diagram}{{4.1}{43}{(\subref {fig:Repair_Diagram_diagram}) diagram of front view of a single piezo motor with associated nomenclature. Front plate is turned around and moved to the side. (\subref {fig:Repair_Diagram_image}) a roughly corresponding image as a photo of the Mask Aligner. The lower right solder anchor is detached in the image and the lower left solder anchor is bridged with a technique discussed in Section \ref {ch:solder_anchors}}{figure.caption.55}{}}
\citation{torr_seal}
\@writefile{toc}{\contentsline {section}{\numberline {4.2}General UHV device preparation}{44}{section.4.2}\protected@file@percent }
\@writefile{toc}{\contentsline {subsection}{\numberline {4.2.1}UHV compatible Soldering}{44}{subsection.4.2.1}\protected@file@percent }
@@ -47,8 +47,8 @@
\newlabel{sub@fig:Z3_reglue_process_dot}{{c}{47}{\relax }{figure.caption.58}{}}
\newlabel{fig:Z3_reglue_process_down}{{4.4d}{47}{\relax }{figure.caption.58}{}}
\newlabel{sub@fig:Z3_reglue_process_down}{{d}{47}{\relax }{figure.caption.58}{}}
-\@writefile{lof}{\contentsline {figure}{\numberline {4.4}{\ignorespaces The re-gluing process shown for the upper left piezo on Z3 that was no longer attached to the Mask Aligner Body. (a) detached piezo. Remains of the EPO-TEK H70E epoxy glue are visible as brown stains on both the Mask Aligner Body and the piezo stack. (b) remains of glue were scratched off carefully. (c) shows the applied dot of Torr Seal epoxy glue. (d) two nuts and the prism used as weights and alignment tools during curing.}}{47}{figure.caption.58}\protected@file@percent }
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+\@writefile{lof}{\contentsline {figure}{\numberline {4.4}{\ignorespaces The re-gluing process shown for the upper left piezo on Z3 that was no longer attached to the Mask Aligner Body. (a) detached piezo. Remains of the EPO-TEK H70E epoxy glue are visible as brown stains on both the Mask Aligner Body and the piezo stack. (b) remains of glue were scratched off carefully. (c) the applied dot of Torr Seal epoxy glue. (d) two nuts and the prism used as weights and alignment tools during curing.}}{47}{figure.caption.58}\protected@file@percent }
+\newlabel{fig:Z3_reglue_process}{{4.4}{47}{The re-gluing process shown for the upper left piezo on Z3 that was no longer attached to the Mask Aligner Body. (a) detached piezo. Remains of the EPO-TEK H70E epoxy glue are visible as brown stains on both the Mask Aligner Body and the piezo stack. (b) remains of glue were scratched off carefully. (c) the applied dot of Torr Seal epoxy glue. (d) two nuts and the prism used as weights and alignment tools during curing}{figure.caption.58}{}}
\@writefile{lof}{\contentsline {figure}{\numberline {4.5}{\ignorespaces The final glued position of the upper Z3 motor after re-gluing. Red line shows the deviation from the other piezo stack. The angle $\alpha $ is about $ \approx 4.5^\circ \pm 0.5^\circ $.}}{48}{figure.caption.59}\protected@file@percent }
\newlabel{fig:Z3_after reglue}{{4.5}{48}{The final glued position of the upper Z3 motor after re-gluing. Red line shows the deviation from the other piezo stack. The angle $\alpha $ is about $ \approx 4.5^\circ \pm 0.5^\circ $}{figure.caption.59}{}}
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diff --git a/chap04.tex b/chap04.tex
index f90acde2a65185b1b111c1ce343cd8f85de31dcc..357a636e90ddd25ff8d93b253e04c4a1321d163c 100644
--- a/chap04.tex
+++ b/chap04.tex
@@ -16,7 +16,7 @@ The Mask Aligner was built in 2015, during the master thesis of Tim Olscchewski~
\caption{}
\label{fig:Repair_Diagram_image}
\end{subfigure}
- \caption{(\subref{fig:Repair_Diagram_diagram}) diagram of front view of a single piezo motor with associated nomenclature. Front plate is turned around and moved to the side. (\subref{fig:Repair_Diagram_image}) shows a roughly corresponding image as a photo of the Mask Aligner. The lower right solder anchor is detached in the image and the lower left solder anchor is bridged with a technique discussed in Section \ref{ch:solder_anchors}}
+ \caption{(\subref{fig:Repair_Diagram_diagram}) diagram of front view of a single piezo motor with associated nomenclature. Front plate is turned around and moved to the side. (\subref{fig:Repair_Diagram_image}) a roughly corresponding image as a photo of the Mask Aligner. The lower right solder anchor is detached in the image and the lower left solder anchor is bridged with a technique discussed in Section \ref{ch:solder_anchors}}
\label{fig:Repair_Diagram}
\end{figure}
@@ -151,7 +151,7 @@ The piezo stacks in the Mask Aligner were also glued in 2015 with the non-conduc
\caption{}
\label{fig:Z3_reglue_process_down}
\end{subfigure}
- \caption{The re-gluing process shown for the upper left piezo on Z3 that was no longer attached to the Mask Aligner Body. (a) detached piezo. Remains of the EPO-TEK H70E epoxy glue are visible as brown stains on both the Mask Aligner Body and the piezo stack. (b) remains of glue were scratched off carefully. (c) shows the applied dot of Torr Seal epoxy glue. (d) two nuts and the prism used as weights and alignment tools during curing.}
+ \caption{The re-gluing process shown for the upper left piezo on Z3 that was no longer attached to the Mask Aligner Body. (a) detached piezo. Remains of the EPO-TEK H70E epoxy glue are visible as brown stains on both the Mask Aligner Body and the piezo stack. (b) remains of glue were scratched off carefully. (c) the applied dot of Torr Seal epoxy glue. (d) two nuts and the prism used as weights and alignment tools during curing.}
\label{fig:Z3_reglue_process}
\end{figure}
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index 737d168a89e1bf058c696ccf4b04c56472948210..72c62a9fb289b8d7ffcbd7a3b97ccf97373f897d 100644
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