diff --git a/Laboratory regulations.md b/Laboratory regulations.md index 80cc7092b83f65285b9819552b416e914934e724..b66b40838024b190fa201e53cf3e33ad4ebdfc3d 100644 --- a/Laboratory regulations.md +++ b/Laboratory regulations.md @@ -1,255 +1,352 @@ -## Laboratory regulations -### Central laboratory for Micro- und Nanotechnology -### Compound Semiconductor Technology -– State January 2019 – +# Laboratory Regulations +Supplementary general operating instructions in the \ +Central laboratory for micro- and nanotechnology for the facilities and rooms of \ +Compound Semiconductor Technology -The general clean room laboratory regulations for the Central Laboratory for Micro and Nanotechnology apply. These laboratory regulations govern specifics for the rooms and facilities of the Compound Semiconductor Technology. +Last update: **2022-05-18** -These laboratory regulations define basic behaviour, provide information on special hazards and regulate the handling of hazardous substances. They are binding, must be known to all employees and must be displayed in an easily visible manner. Employees must strictly observe and comply with the individual regulations. +The "allgemeine Reinraumlaborordnung für das Zentrallabor für Mikro- und Nanotechnologie" apply to the Central Laboratory for Micro- and Nanotechnology ([PDF as of 2016-04](ZMNT%20-%20Reinraumlaborordnung%202016_04_20.pdf) [1]). This document regulates specific information for the rooms and systems of Compound Semiconductor Technology. +These laboratory regulations define basic behaviour, provide information on special hazards and regulate the handling of hazardous substances. They are binding and must be known to all employees. Access to the operating instructions must be ensured at all times. Employees must strictly observe and comply with the individual requirements. -### 1. General -#### Basic Information +## 1. General +### 1.1. Persons who are not in possession of the necessary physical and mental prerequisites cannot be permitted to work in the laboratory. -Eating, drinking and smoking is prohibited in the laboratory. +It is not allowed to work alone. Between 9 a.m. and 5 p.m., the stay is only allowed if at least two people are present. -Between 8 a.m. and 5 p.m., there are no restrictions on being in the clean room. Between 5 p.m. and 8 a.m., the stay is only permitted if at least two persons are in the clean room, at least one of whom must be an employee (not a student). +Between 5 p.m. and 9 a.m., the stay is only allowed if at least two people are present in the cleanroom, of which at least one must be an employee, i.e. not a student (m/f/d). -**Expectant and nursing mothers** are subject to special protection and are **not** allowed to enter the laboratory area. +Expectant and nursing mothers are subject to special protection and are not allowed to enter the laboratory. -The laboratory facilities are to be treated with care. The material has to be used sparingly. +Unauthorized persons are prohibited from entering the laboratory. -**Each user** is responsible for **order and cleanliness** at the workplaces. The workplace must be left in a **properly** condition (clean, tidy and free of tension) after completion of the work. +### 1.2. Conduct +Eating, drinking and smoking is prohibited in the laboratory. This includes chewing gum. -**Prior instruction** in the operation of machines and equipment is a condition for their use. The proper special instructions in each case have to be noticed. +The laboratory facilities are to be treated with care. The material has to be used sparingly. -**Equipment, materials, records of unfinished work** shall be kept securely and **named** in the place provided for them. +Each user is responsible for order and cleanliness at the workplaces. The workplace must be left in a properly condition (clean, tidy and free apllied voltage) after completion of the work, samples and materials are to be cleared to the appropriate places. The instructions of the employees (lecturers, scientific and other staff) must be followed at all times. -Unauthorised persons are prohibited from entering the laboratories. +Traffic, escape and rescue routes must be kept clear. Placing objects of any kind is prohibited. The fire protection regulations [2] (Appendix A) must be observed. -Safety regulations must be strictly observed, and not only in your own interest. Personal injuries due to accidents are subject to the university's liability principles. +Ongoing processes must not remain unobserved. Attendance is compulsory. -Traffic, escape and rescue routes must be kept clear. Placing objects of any kind is prohibited. The fire protection regulations must be observed. +When entering (leaving) the laboratory, you must log in (log out) on the magnetic board hung up in front of the lock. -In the laboratory, only work may be carried out that serves the respective task and that has been agreed upon with the professor or his or her representative (employee). +### 1.3. Instructions +Prior instruction in the operation of machines and equipment is a condition for their use. The proper special instructions in each case have to be noticed. -Ongoing processes must not remain unobserved. Attendance is compulsory. +**MISSING** **MISSING** + +Safety regulations must be strictly observed, and not only in your own interest. Personal injuries due to accidents are subject to the university's liability principles. +In the laboratory, only work may be carried out that serves the respective task and that has been agreed upon with the professor or his or her representative (employee). -### Work material +### 1.4. Material Any equipment etc. that is not part of the laboratory's inventory may only be used with the approval of the laboratory management. + Damage, loss or other peculiarities of laboratory equipment must be reported immediately to the laboratory staff. Damage and losses are subject to the liability principles of the university. + Objects from the laboratory's stock may only be borrowed for a short time against receipt with the permission of the laboratory management. -Emergency facilities + +Equipment, materials, records of unfinished work shall be kept securely and marked with a name in the place provided for them. + +~~Only cleanroom-suitable materials (e.g. no wood, paper) may be taken into the cleanroom.~~ + +If a consumable is running low, the laboratory management must be informed. This must be done not only when the last consumable is used, but when it is already apparent that there is little material available. + +### 1.5. Emergency Facilities Emergency equipment includes people emergency showers, eye showers, if necessary, additionally eye wash bottles, hand-held fire extinguishers, main switches for electrical supply, gas shut-off valves, first-aid boxes. + All emergency facilities must not be obstructed or covered. They shall be kept clearly visible and freely accessible. -All workers must know the locations of the emergency facilities and be informed about their function. -People safety showers and eye showers must be checked monthly. The seal may have to be removed for this purpose. The inspections are to be entered in a list. + +All employees must know the locations of the emergency facilities and be informed about their function. + +People safety showers and eye showers must be checked monthly. The inspections are to be entered in a list. + Hand-held fire extinguishers that have been used or only slightly used, as well as damaged ones (even if the seal is damaged), must be reported immediately to the appropriate department (Dezernat 10 - Facility Management) for replacement. - -2. Protective measures and rules of conduct -Alarms -In the event of the following alarms, the clean room must be left in an orderly manner: - Gas alarm - Fire alarm -Installations should, as far as time permits, be restored to a condition in which no hazard occurs. -Lab coat and footwear -A lab coat or overall must be worn in the laboratory. The upper part of the body, arms and legs must be covered with clothing or a lab coat/overall. Gowns or overalls are only allowed to be put on and taken off in the sluice. + +## 2. Protective Measures and Rules of Conduct +### 2.1. Gas and Fire Alarm +According to [1]: "All persons working in the gray room and clean room leave these rooms immediately using the shortest route" (see escape and rescue route plan in Appendix 1 of [1])." + +### 2.2. Lab Coat and Footwear +An overall must be worn in the laboratory. The upper part of the body, arms and legs must be covered with the overall. The overall may only be put on and taken off in the lock. + Sturdy closed and sure-footed footwear with a cleanroom-suitable overshoe or special cleanroom footwear must be worn. -Headgear and gloves + +Dirty overalls are to be put in the laundry box. Cleanroom clothing is stored in the lock and drawer cabinet in the hallway; inform the staff if the stock is running low. + +### 2.3. Headgear and Gloves A hair net must be worn in the laboratory. A cleanroom hood is to be worn in special areas. + Latex or comparable gloves must be worn when working in the laboratory. When working with acids, alkalis and other hazardous substances, additional special protective gloves must be worn. These must be checked for suitability before use (must not have any tears or holes). -Safety googles -Safety googles must be worn for many laboratory tasks. Wearers of glasses need optically corrected safety googles or over-glasses over the corrective glasses. -Flowboxes + +Special protective gloves must also be worn for the following work: +- when handling liquid nitrogen, +- when operating the tube oven. + +### 2.4 Safety Glasses +Safety goggles must be worn for many tasks in the laboratory. Wearers of glasses must wear over-glasses (basket glasses) over their own glasses or optically corrected safety glasses. + +Examples: +- When handling chemicals (solvents / acids / alkalis) of all kinds, +- when handling liquid nitrogen, +- when handling photoresists, +- when handling rotating equipment such as resist centrifuges, resist developers and dry centrifuges. + +### 2.5. Flowboxes Flowboxes are intended to keep the work area as particle-free as possible and, similar to fume cupboards, prevent hazardous substances from entering the breathing air during work. Only solvents / substances with a low hazard level may be used in the flowboxes. If the exhaust air fails, use must be discontinued. Equipment must be shut down (cooling water must continue to run if necessary). Inform a supervisor. -Deduktions -Deductions in laboratories are designed to prevent hazardous substances from entering the air breathed during work and to protect the user against splashes of hazardous substances or flying glass splinters. -The deductions are only fully effective when the front and side sashes are closed. When working under the deduction, do not open the front glass more than necessary. The user's head should always remain in the protection of the glass. -After use, the front sashes of the deductions must be closed. -Pollutants may also be released in the deductions only in the event of malfunctions or when filling the apparatus. Excess reaction gases, vapours, aerosols or dusts produced during normal work must be collected by special measures (e.g., by appropriate washing bottle arrangements or special filters). -Substances which may give off very toxic, poisonous, carcinogenic, mutagenic, toxic to reproduction, harmful to health, corrosive or flammable gases, vapours, aerosols or dusts may only be handled in the deduction. -If the exhaust air fails, use must be discontinued. Equipment must be shut down (cooling water must continue to run if necessary). Inform supervisor. -Pipetting + +### 2.6 Fume Hoods +Fume hoods in laboratories are designed to prevent hazardous substances from entering the air breathed during work and to protect the user against splashes of hazardous substances or flying glass splinters. + +The fume hoods are only fully effective when the front and side sliders are closed. When working under the fume hood, do not open the front glass more than necessary. The user's head should always remain in the protection of the glass. + +After use, the front sliders of the fume hood must be closed. + +Pollutants may also be released in the fume hoods only in the event of malfunctions or when filling the apparatus. Excess reaction gases, vapours, aerosols or dusts produced during normal work must be collected by special measures (e.g., by appropriate washing bottle arrangements or special filters). + +Hazardous substances which may give off very toxic, poisonous, carcinogenic, mutagenic, toxic to reproduction, harmful to health, corrosive or flammable gases, vapours, aerosols or dusts may only be handled in the fume hood. + +If the ventilation fails, use must be discontinued. Equipment must be shut down (cooling water must continue to run if necessary). Inform supervisor. + +### 2.7. Pipetting Pipetting by mouth is prohibited without exception. -Handling machines and electrical equipment + +### 2.8. Handling Machines and Electrical Equipment It is prohibited to bypass or disable safety and protective devices. + Experimental set-ups under voltage must not be left to themselves. + Work on superstructures that can lead to peak voltages of over 40V must only be carried out with one hand! + Pay attention to safety signs. -Work with vacuum -To protect against flying glass splinters as a result of implosions, glass vessels must be secured e.g. with shrink or adhesive foil, protective cage, protective shield. The same applies to work with rotary evaporators. They must be carried out in a closed deduction or behind a protective shield. -Compressed gas cylinders -Compressed gas cylinders must be operated with suitable pressure reducing valves. The valves on compressed gas cylinders must be closed after use and after emptying. Filled and emptied cylinders may only be transported with the protective cap screwed on. Compressed gas cylinders containing hazardous substances require special safety requirements, e.g. storage in hazardous substance cabinets with exhaust air. Further information on hazardous substances can be found in the respective operating instructions. -Other + +##2.9. Tasks with Vacuum +To protect against flying glass splinters as a result of implosions, glass vessels must be secured e.g. with shrink or adhesive foil, protective cage, protective shield. The same applies to work with rotary evaporators. They must be carried out in a closed fume hood or behind a protective shield. + +### 2.10. Compressed gas cylinders +Compressed gas cylinders must be operated with suitable pressure reducing valves. The valves on compressed gas cylinders must be closed after use and after emptying. + +Filled and emptied cylinders may only be transported with the protective cap screwed on. Compressed gas cylinders containing hazardous substances require special safety requirements, e.g. storage in hazardous substance cabinets with exhaust air. Further information on hazardous substances can be found in the respective operating instructions. + +### 2.11. Other Broken glass must be disposed of using the appropriate waste containers. + The laboratories are to be kept clean and in a proper condition. The floor is to be kept free of deposited objects. Fire loads are to be kept to a minimum. + The workplace must be left in an orderly condition (clean and tidy) at the end of the work. - -2.1. Handling hazardous substances -Hazardous substance designation -For the purposes of the EU GHS CLP Regulation (EC Regulation No. 1272/2008), hazardous substances are substances or mixtures that fall into at least one of the following hazard classes: - -explosive substances/mixtures and articles containing explosives, -flammable gases, -flammable aerosols, -oxidizing gases, -Gases under pressure, -flammable liquids, -flammable solids, -self-reactive substances or mixtures, -organic peroxides, -pyrophoric liquids, -pyrophoric solids, -self-heating substances or mixtures, -Substances or mixtures which, in contact with water, emit flammable gases., -oxidizing liquids, -Oxidising solids, Corrosive to metals, -Acute toxicity, corrosive/irritant effect on the skin, -Serious eye damage/eye irritation, -Sensitisation of the respiratory tract, -Respiratory sensitisation of the skin, -Germ cell mutagenicity, -Carcinogenicity, -Reproductive toxicity, -Specific target organ toxicity (single exposure), -Specific target organ toxicity (repeated exposure), -Aspiration hazard, -Acutely hazardous to water, -Hazardous to water in the long term, -Damaging the ozone layer + +## 3. Handling Hazardous Substances +### 3.1. Hazardous Substance Designation +For the purposes of the Regulation (EG) No. 1272/2008 (CLP), hazardous substances are substances or mixtures that fall into at least one of the following hazard classes: -Labelling -All containers in the laboratory must be labelled with the name of their contents. In the case of hazardous substances, the labelling shall include at least, in addition to the substance name, the hazard designation and the hazard symbol as well as the numbers of the H- and P-phrases. Containers of waste substances must also be labelled according to their hazard potential. For beakers in which the contents are only stored for a limited period of time, labelling with the name, date and user is sufficient. -Containers and vessels +#### Physical Hazards +- Explosive, +- Flammable gas, +- Flammable aerosol, +- Oxidizing gas, +- Gases under pressure, +- Flammable liquid, +- Flammable solid, +- Self-reactive substance or mixture, +- Pyrophoric liquid, +- Pyrophoric solid, +- Self-heating substance or mixture, +- Substance or mixture which in contact with water emit flammable gas, +- Oxidizing liquid, +- Oxidising solid, +- Organic peroxide, +- Substance or mixture corrosive to metals +- Desensitized explosive mixtur _?_ + +#### Health Hazards +- Acute toxicity, +- Skin corrosion/irritation, +- Serious eye damage/eye irritation, +- Respiratory/skin sensitisation, +- Germ cell mutagenicity, +- Carcinogenicity, +- Reproductive toxicity, +- Specific target organ toxicity - single exposure, +- Specific target organ toxicity - repeated exposure, +- Aspiration hazard + +#### Enviroment Hazards +- Hazardous to the aquatic enviroment, +- Hazardous for the ozone layer + +### 3.2. Labelling +All containers in the laboratory must be labelled with the name of their contents. + +In the case of hazardous substances, the labelling shall include at least, in addition to the substance name, the hazard designation and the hazard symbol as well as the numbers of the H- and P-phrases. Containers of waste substances must also be labelled according to their hazard potential. For beakers in which the contents are only stored for a limited period of time, labelling with the name, date and user is sufficient. + +### 3.3. Containers and Vessels Vessels containing substances must be labelled immediately with: Contents, date of filling and name or abbreviation of the person who filled the container. + Hazardous substances must not be stored in containers that could lead to confusion with food. It is prohibited to fill hazardous substances into containers in which foodstuffs are usually stored. + The material of the container must be suitable for the storage of the substance concerned. -Flammable liquids + +### 3.4. Flammable Liquids Flammable liquids for hand use must not be stored in containers with a capacity of more than 1 litre. The total quantity should not exceed 10 litres per laboratory. If larger quantities are absolutely necessary for the progress of the work, they must be stored in a safety cabinet. - -Instruction + +### 3.5. Instruction The laboratory workers must be informed of the particular hazards of the substances before use. Personal protective equipment: The personal protective equipment (e.g. face shield, safety goggles, protective gloves, hand ointments) specified in the safety advices (P-phrases) and in special operating instructions must be kept available and used. -Other + +The safety data sheets (SDB/MDS) must be observed. + +### 3.6. Disposal +Waste chemicals must be disposed separately in the containers provided for this purpose (e.g. organic solvent containers for acetone, propanol, NMP). Only small quantities of acids and alkalis can be disposed via the drain (neutralisation plant); for larger quantities or special waste, please consult the technical manager or supervisor! + +When disposing of waste in the bins placed in the cleanroom, make sure that they are divided into two categories: Materials with solvents and materials with acids and alkalis. Contaminated material is to be disposed in the corresponding waste bins. + +### 3.7. Other Before handling hazardous substances and before carrying out work procedures during which hazardous substances may be released, the hazard potential must be determined and the necessary protective measures taken. + Hazardous substances shall be kept and stored in such a way that they do not endanger human health and the environment. -Avoid inhalation of vapours and dusts and contact of hazardous substances with skin and eyes. When openly handling gaseous, dusty or hazardous substances which already outgas at low temperatures, work must always be carried out in a deduction. + +Avoid inhalation of vapours and dusts and contact of hazardous substances with skin and eyes. When openly handling gaseous, dusty or hazardous substances which already outgas at low temperatures, work must always be carried out in a fume hood. + Chemicals, but especially flammable liquids, may only be present at the workplace during working hours in limited quantities that are necessary for the immediate progress of the work. The number of containers shall be limited to what is strictly necessary. + Properly dispose of all prepared liquids that are no longer required. + Do not place or store flammable liquids on or near hot plates or similar objects.. + Special operating instructions must be observed for etching work. + Personal protective equipment must be used, e.g. safety goggles, protective gloves and protective gowns. + Safety signs must be respected. - -3. Behaviour in case of danger + +After use, the chemicals must be disposed of and the beakers placed in the dishwasher. Beakers may be left in the fume hood for a maximum of two days, at the end of the second day they must be cleared away. + +## 4. Behaviour in Case of danger When dangerous situations occur, you must pay attention to the following: - Personal protection takes precedence over property protection. - Keep calm and avoid hasty, ill-considered action. - Warn endangered persons, if necessary ask them to leave the rooms. - Fire: In the event of a fire, the university's fire protection regulations must be observed and the rules laid down therein must be followed. - As far as possible without personal danger: Shut down endangered experimental and procedural processes; turn off gas, electricity and, if necessary, water (cooling water must continue to run). -In particular - Make an emergency call, Tel.: 113 - Until the fire brigade arrives, the fire must be fought with the fire extinguishers available, provided this can be done safely. CO2 fire extinguishers are preferable in the laboratory. - Arrange for fire brigade emergency vehicles to be awaited and briefed on the road. - All persons not involved in extinguishing or rescue measures must leave the dangerous area. - Windows and doors must be kept closed. - Lifts are not allowed to be used. - Clothing fires must be extinguished with fire extinguishers or emergency showers or smothered with fire blankets. - If possible, simultaneously warn endangered persons from neighbouring areas and ask them to leave the rooms. -Leakage of hazardous gases - If possible, close valves or, if possible, without endangering oneself, ensure good ventilation. - In the case of flammable gases, avoid ignition sources, do not operate electric switches. - Inform superiors. -For flammable liquids - Avoid ignition sources, - Do not operate electric switches, - Ensure thorough ventilation as far as possible without personal danger, - Absorb with absorbents or binders, - bring out into the open air or use tightly closing collection containers and - Inform supervisor. - Send for disposal. -For corrosive liquids - Ventilate well, - absorb with a suitable binding agent and - Inform supervisor. - Send for disposal. - If it is necessary to leave the rooms, turn off the equipment if possible (except cooling water). -4. First aid and emergency numbers - Pay attention to your own safety when providing assistance. - In case of accidents resulting in minor injuries, indisposition or skin reactions, a doctor must be consulted. Every electrical accident must be presented to a doctor. - In the event of accidents involving serious injuries and injuries whose nature and severity cannot be assessed, an emergency doctor must be alerted immediately. - Give first aid until the arrival of the emergency doctor. - Let people who know the area at the entrance of the building wait to guide the emergency doctor directly to the injured person. - The First Aid notice board shows instructions for first aid measures. -Important emergency number -Emergency call - Fire brigade - Ambulance service: Telephone: 113 -Further emergency numbers can be found on the following signs in the laboratory or near a telephone: -5. Disposal and resource conservation + +- Personal protection takes precedence over property protection. +- Keep calm and avoid hasty, ill-considered action. +- Warn endangered persons, if necessary ask them to leave the rooms. +- Fire: In the event of a fire, the university's fire protection regulations must be observed [2] and the rules laid down therein must be followed. +- As far as possible without personal danger: Shut down endangered experimental and procedural processes; turn off gas, electricity and, if necessary, water (cooling water must continue to run). + +#### In particular +- Make an emergency call, Tel.: 113 +- Until the fire brigade arrives, the fire must be fought with the fire extinguishers available, provided this can be done safely. CO2 fire extinguishers are preferable in the laboratory. +- Arrange for fire brigade emergency vehicles to be awaited and briefed on the road. +- All persons not involved in extinguishing or rescue measures must leave the dangerous area. +- Windows and doors must be kept closed. +- Lifts are not allowed to be used. +- Clothing fires must be extinguished with fire extinguishers or emergency showers or smothered with fire blankets. +- If possible, simultaneously warn endangered persons from neighbouring areas and ask them to leave the rooms. + +#### Leakage of Hazardous Gas +- If possible, close valves or, if possible, without endangering oneself, ensure good ventilation. +- In the case of flammable gases, avoid ignition sources, do not operate electric switches. +- Inform superiors. + +#### For Flammable Liquid +- Avoid ignition sources, +- Do not operate electric switches, +- Ensure thorough ventilation as far as possible without personal danger, +- Absorb with absorbents or binders, +- Bring out into the open air or use tightly closing collection containers and +- Send for disposal. +- Inform supervisor. + +#### For Corrosive Liquids +- Ventilate well, +- Absorb with a suitable binding agent and +- Inform supervisor. +- Send for disposal. +- If it is necessary to leave the rooms, turn off the equipment if possible (except cooling water). + +## 5. First Aid and Emergency Numbers +- Pay attention to your own safety when providing assistance. +- In case of accidents resulting in minor injuries, indisposition or skin reactions, a doctor must be consulted. Every electrical accident must be presented to a doctor. +- In the event of accidents involving serious injuries and injuries whose nature and severity cannot be assessed, an emergency doctor must be alerted immediately. +- Give first aid until the arrival of the emergency doctor. +- Let people who know the area at the entrance of the building wait to guide the emergency doctor directly to the injured person. +- The First Aid notice board shows instructions for first aid measures. + +### 5.1. First Aid + \ + + +_Plakat Erste Hilfe momentan doppelt eingebunden da online und als pdf anders verlinkt werden muss_ + +#### Specific Measures +- In case of burns or chemical burns, immediately rinse thoroughly with cold water! (Emergency or eye showers!) +- In the case of hydrofluoric acid burns, calcium gluconate gel (see first aid kit) should also be rubbed in. + +#### Emergency Number +Emergency call - Fire brigade - Ambulance service **113** + +## 6. Disposal and resource conservation The quantities of chemicals and solvents used must be kept to the minimum possible. The principle of " utilization before disposal" applies here. + Pollution of the wastewater with substances hazardous to water must be prevented. + The specifications for the separate collection of materials must be strictly adhered to. The containers must be properly labelled. -6. Special working instructions -General -It is not allowed to eat (incl. chewing gum) and drink in the laboratory. -Only cleanroom-suitable materials (e.g. no wood, paper) may be taken into the cleanroom. -Chemicals may only be worked with under deductions; protective clothing (safety goggles and protective gloves) must be worn in any case. -It is not allowed to work alone, at least two people must be present. -Processes in progress are not allowed to run unobserved. (Compulsory attendance, if necessary, discuss with technical manager or supervisor). -In the event of a (gas) alarm, the clean room must be vacated immediately. -Protective clothing -Cleanroom-gowns or -overalls may only be put on and taken off in the lock. Cleanroom-(over)shoes are to be put on after the sitover or taken off before the sitover. -Dirty cleanroom-gowns or overalls are to be put in the laundry box. All cleanroom- (disposable-) clothing is stored in the drawer cabinet in the hallway; please let us know if the stock is running low. -Used disposable-cleanroom-clothing (gloves, overshoes, bonnets) are to be disposed of in the rubbish bin. -Safety glasses must be worn in the laboratory for the following work (wearers of glasses must wear over-glasses (basket glasses) over their own glasses or optically corrected safety glasses): - When handling chemicals (solvents / acids / alkalis) of all kinds, - when handling liquid nitrogen, - when handling photoresists, - when handling rotating equipment such as resist centrifuges, resist developers and dry centrifuges. -Special protective gloves must be worn for the following work: - When handling acids and alkalis, - when handling liquid nitrogen, - when operating the tube oven. -Stay in the laboratory -Between 8 a.m. and 5 p.m., there is no restriction on staying in the clean room. -Between 5 p.m. and 8 a.m., the stay is only allowed if at least two people are in the clean room, of which at least one must be a permanent employee (not a student). -Log-in -When entering (leaving) the laboratory, you must log in (log out) on the magnetic board hung up in front of the lock. -Briefing -All devices in the clean room are to be used only after instruction. The operating instructions and safety data sheets must be observed for all devices. - -Organisation of work -Do not leave filled beakers in the deductions without labelling. They must be labelled with contents, date and name. After use, dispose the chemicals and put the beakers in the dishwasher. Beakers may be left in the deduction for a maximum of two days, at the end of the second day they must be put away. -The workplaces are to be left tidy, samples and materials are to be stored in the appropriate places. -Disposal -Waste chemicals must be disposed separately in the containers provided for this purpose (e.g. organic solvent containers for acetone, propanol, NMP). Only small quantities of acids and alkalis can be disposed via the drain (neutralisation plant); for larger quantities or special waste, please consult the technical manager or supervisor! -When disposing of waste in the bins placed in the cleanroom, make sure that they are divided into two categories: Materials with solvents and materials with acids and alkalis. Contaminated material is to be disposed in the corresponding waste bins. -First aid measures - Call for help. - In case of burns or chemical burns, immediately rinse thoroughly with cold water! (Emergency or eye showers!) - In the case of hydrofluoric acid burns, calcium gluconate gel (see first aid kit) should also be rubbed in. -Material consumption -If a consumable is running low, the laboratory management must be informed. This must be done not only when the last consumable is used, but when it is already apparent that there is little material available. -Ventilation maintenance + +## 7. Further Instructions +### 7.1. Ventilation Maintenance Once a month, the ventilation in the technologies is serviced (i.e. switched off) in the morning, during which time it is forbidden to be in the laboratory. In the Walter-Schottky-Haus, ventilation maintenance usually takes place every 3rd Monday of the month, in the Central Laboratory for Technology usually every 4th Tuesday of the month. -Briefing -Before starting work, the employees must be instructed based on the operating instructions in relation to the workplace. The content and time of the instruction must be recorded in writing and confirmed by the signatures of the persons instructed. +## 8. Referrals +[1] [Allgemeine Reinraumlaborordnung für das ZMNT Stand 2016-04](ZMNT%20-%20Reinraumlaborordnung%202016_04_20.pdf) \ +[2] [Brandschutzordnung der RWTH (Intranet)](https://www9.rwth-aachen.de/awca/c.asp?id=btmk), siehe Anhang A, aufgerufen 2022-05-17 \ +[3] [Brandschutzordnung Teil A (Aushang)](https://www.rwth-aachen.de/global/show_document.asp?id=aaaaaaaaaaajthg&download=1), siehe Anhang A, aufgerufen 2022-05-17 - -7. List of changes +## 9. List of Changes 2013-06-10 Creation - Draft 2014-03-13 Published -2014-06-26 Hazardous substances, material consumption, heels +2014-06-26 Hazardous substances, material consumption, paragraph 2014-11-24 DGUV Information 213-850, compulsory attendance taken over from old "briefing” 2015-01-15 Minor corrections Chap. 2 Flowbox & deductions 2016-04-21 Minor adjustment together with the introduction of the General Cleanroom Laboratory Regulations -2018-11-07 Update to Compound Semiconductor Technology, old hazardous substances removed, minor error corrections. -2019-01-16 Minor changes -2021-12-17 Translated into English +2018-11-07 Update to Compound Semiconductor Technology, old hazardous substances removed, minor error corrections. +2019-01-16 Minor changes +2021-12-17 Translated into English +2022-05-18 Adaption to the current proposal + +## Appendix A +See german version! + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + diff --git a/Laborordnung.md b/Laborordnung.md index 8d02e79f14fc4300dbef756d02a175b1802d13b4..fd9379e886be41893804384f8e237d34a68784eb 100644 --- a/Laborordnung.md +++ b/Laborordnung.md @@ -5,19 +5,17 @@ Compound Semiconductor Technology Stand: **2022-05-18** -Es gilt die allgemeine Reinraumlaborordnung für das Zentrallabor für Mikro- und Nanotechnologie ([PDF Stand 2016-04](ZMNT%20-%20Reinraumlaborordnung%202016_04_20.pdf) [1]). - Diese Laborordnung regelt spezifisches für die Räume und Anlagen vom Compound Semiconductor Technology. +Es gilt die allgemeine Reinraumlaborordnung für das Zentrallabor für Mikro- und Nanotechnologie ([PDF Stand 2016-04](ZMNT%20-%20Reinraumlaborordnung%202016_04_20.pdf) [1]). Diese Laborordnung regelt spezifisches für die Räume und Anlagen vom Compound Semiconductor Technology. Diese Laborordnung legt grundsätzliche Verhaltensweisen fest, gibt Hinweise auf besondere Gefährdungen und regelt den Umgang mit Gefahrstoffen. Sie ist verbindlich und muss allen Beschäftigten bekannt sein.Die Zugriffsmöglichkeit auf die Betriebsanweisungen ist jederzeit sicherzustellen. Die Beschäftigten haben die einzelnen Vorgaben strikt zu beachten und einzuhalten. ## 1. Allgemeines - -### 1.1. Aufentalt +### 1.1. Aufenthalt Personen, die nicht im Besitz der erforderlichen körperlichen und geistigen Voraussetzungen sind, kann die Arbeit im Labor nicht gestattet werden. In Laboren darf nicht alleine gearbeitet werden. Zwischen 9 und 17 Uhr ist der Aufenthalt nur erlaubt, wenn mindestens zwei Personen anwesend sind. -Zwischen 17 und 9 Uhr ist der Aufenthalt nur erlaubt, wenn mindestens zwei Personen im Reinraum anwesend sind, davon muss mindestens eine Angestellt sein, also nicht Student (m/w/d). +Zwischen 17 und 9 Uhr ist der Aufenthalt nur erlaubt, wenn mindestens zwei Personen im Reinraum anwesend sind, davon muss mindestens eine Angestellt sein, d.h. kein Student (m/w/d). Werdende und stillende Mütter unterstehen besonderem Schutz und dürfen das Labor nicht betreten. @@ -73,7 +71,7 @@ Handfeuerlöscher, die benutzt oder auch nur angebraucht wurden, sowie beschädi ## 2. Schutzmaßnahmen und Verhaltensregeln ### 2.1. Gasalarm und Feueralarm - Entsprechend [1]: "Alle im Grauraum und Reinraum arbeitende Personen verlassen unverzüglich diese Räume auf dem kürzesten Weg" (s. Flucht- und Rettungswegeplan im Anhang 1 von [1])." +Entsprechend [1]: "Alle im Grauraum und Reinraum arbeitende Personen verlassen unverzüglich diese Räume auf dem kürzesten Weg" (s. Flucht- und Rettungswegeplan im Anhang 1 von [1])." ### 2.2. Laboroverall u. Schuhwerk Im Labor ist ein Overall zu tragen. Oberkörper, Arme und Beine müssen mit dem Overall bedeckt sein. Der Overall darf nur in der Schleuse an- und ausgezogen werden. @@ -200,7 +198,7 @@ Brennbare Flüssigkeiten für den Handgebrauch dürfen nicht in Behältnissen ü ### 3.5. Unterweisung Die Laborbeschäftigten sind vor der Benutzung jeweils auf die besonderen Gefahren der Stoffe hinzuweisen. Persönliche Schutzausrüstung: Die in den Sicherheitsratschlägen (P-Sätzen) und in speziellen Betriebsanweisungen vorgegebenen Körperschutzmittel (z.B. Gesichtsschutz, Schutzbrille, Schutzhandschuhe, Handsalben), sind bereitzuhalten und zu benutzen. -Die Sicherheitsdatenblätter (SDB/MDS) zu beachten. +Die Sicherheitsdatenblätter (SDB/MDS) sind zu beachten. ### 3.6. Entsorgung Abfälle von Chemikalien sind getrennt in die dafür bereitstehenden Behälter zu entsorgen (z.B. organische Lösungsmittelbehälter für Aceton, Propanol, NMP). Begrenzte Mengen an Säuren und Laugen können über den Abfluss (Neutralisationsanlage) entsorgt werden; bei großen Mengen bzw. bei Sonderabfällen bitte Rücksprache mit dem Technischen Leiter bzw. Vorgesetzten halten! @@ -221,13 +219,13 @@ Alle angesetzten Flüssigkeiten, die nicht mehr benötigt werden, sind sachgerec Brennbare Flüssigkeiten nicht auf und in die Nähe von Heizplatten und o. ä. stellen bzw. aufbewahren. Bei Ätzarbeiten sind spezielle Betriebsanweisungen zu beachten. + Persönliche Schutzausrüstung ist zu benutzen, z.B. Schutzbrille, Schutzhandschuhe und Schutzkittel. Sicherheitskennzeichen sind zu beachten. Nach der Benutzung sind die Chemikalien zu entsorgen und die Bechergläser in die Spülmaschine zu stellen. Bechergläser dürfen maximal zwei Tage im Abzug stehen, am Ende des zweiten Tages sind diese wegzuräumen. - ## 4. Verhalten im Gefahrfall Beim Auftreten gefährlicher Situationen ist folgendes zu beachten: @@ -238,14 +236,14 @@ Beim Auftreten gefährlicher Situationen ist folgendes zu beachten: - Soweit ohne persönliche Gefährdung möglich: Gefährdete Versuchs- und Verfahrensabläufe abstellen; Gas, Strom und ggf. Wasser abstellen (Kühlwasser muss weiterlaufen). #### Insbesondere gilt - - Notruf auslösen, Tel.: 113 - - Bis zum Eintreffen der Feuerwehr ist der Brand mit den vorhandenen Feuerlöschern zu bekämpfen, sofern dies gefahrlos möglich ist. Im Labor sind CO2-Feuerlöscher vorzuziehen. - - Veranlassen, dass Einsatzfahrzeuge der Feuerwehr auf der Straße erwartet und eingewiesen werden. - - Alle nicht an Lösch- oder Rettungsmaßnahmen beteiligten Personen haben den Gefahrenbereich zu verlassen. - - Fenster und Türen sind geschlossen zu halten. - - Aufzüge dürfen nicht benutzt werden. - - Kleiderbrände sind mit Feuerlöschern oder Notduschen zu löschen, bzw. mit Löschdecken zu ersticken. - - Wenn möglich, gleichzeitig gefährdete Personen aus Nachbarbereichen warnen und zum Verlassen der Räume auffordern. +- Notruf auslösen, Tel.: 113 +- Bis zum Eintreffen der Feuerwehr ist der Brand mit den vorhandenen Feuerlöschern zu bekämpfen, sofern dies gefahrlos möglich ist. Im Labor sind CO2-Feuerlöscher vorzuziehen. +- Veranlassen, dass Einsatzfahrzeuge der Feuerwehr auf der Straße erwartet und eingewiesen werden. +- Alle nicht an Lösch- oder Rettungsmaßnahmen beteiligten Personen haben den Gefahrenbereich zu verlassen. +- Fenster und Türen sind geschlossen zu halten. +- Aufzüge dürfen nicht benutzt werden. +- Kleiderbrände sind mit Feuerlöschern oder Notduschen zu löschen, bzw. mit Löschdecken zu ersticken. +- Wenn möglich, gleichzeitig gefährdete Personen aus Nachbarbereichen warnen und zum Verlassen der Räume auffordern. #### Austreten gefährlicher Gase - Wenn möglich, Ventile schließen oder, wenn ohne Eigengefährdung möglich, für gute Durchlüftung sorgen. @@ -257,7 +255,7 @@ Beim Auftreten gefährlicher Situationen ist folgendes zu beachten: - Elektroschalter nicht betätigen, - für gründliche Durchlüftung sorgen, soweit ohne persönliche Gefährdung möglich. - Mit Saug- oder Bindemitteln aufnehmen, - - ins Freie bringen oder dicht schließende Sammelbehälter verwenden und + - Ins Freie bringen oder dicht schließende Sammelbehälter verwenden und - Der Entsorgung zuführen. - Vorgesetzten informieren. @@ -296,7 +294,7 @@ Eine Belastung des Abwassers mit wassergefährdenden Stoffen ist zu verhindern. Die Festlegungen zur getrennten Sammlung der Materialien sind unbedingt einzuhalten. Die Gefäße müssen ordnungsgemäß gekennzeichnet werden. -## 7. Spezielle Arbeitshinweise +## 7. Weitere Arbeitshinweise ### 7.1. Lüftungswartung Einmal im Monat wird in den Technologien vormittags die Lüftung gewartet (d.h. ausgeschaltet), in dieser Zeit ist der Aufenthalt im Labor untersagt. Im Walter-Schottky-Haus·findet die Lüftungswartung im Regelfall jeden 3. Montag im Monat, im Zentrallabor·für Technologie· im Regelfall jeden 4. Dienstag im Monat statt.